S. Harrell, FACTORY OF THE FUTURE - THE WHOLE FACTORY VIEW, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1879-1882
The primary task of a semiconductor factory is to produce integrated c
ircuits of outstanding performance at a steeply declining cost per ele
ctronic function delivered. The semiconductor industry over the next d
ecade will need to continue to drive costs down in order to maximize m
anufacturing productivity in the climate of rising product complexity,
equipment cost, and risk. Historically we have concentrated on aggres
sive yield improvement and declining wafer fab cost per cm(2) as the d
ominant factors far increasing productivity. To continue to be competi
tive, SEMATECH is extending its focus beyond cost per cm(2) to the mor
e total view of cost per function. We are working toward a combination
of solutions to meet our manufacturing challenges recognizing that no
single solution will provide enough benefit to achieve the productivi
ty gains end users expect. The ''whole factory'' view is a useful stra
tegic planning tool for defining the future of manufacturing in the se
miconductor industry. (C) 1995 American Vacuum Society.