CORRELATION OF STRESS-INDUCED LEAKAGE CURRENT WITH GENERATED POSITIVETRAPPED CHARGES FOR ULTRATHIN GATE OXIDE

In this work, the evidence of the stress-induced leakage current relat ed with the stress-generated positive trapped charges is presented and investigated. It is shown that the centroid of the positive trapped c harges, which depends on the polarity of the stress current, affects t he magnitude of the leakage current. And the trapping density of posit ive charges, which is determined by the final stress applied on the ox ide, determines the final level of the leakage currents.