We investigate a model for epitaxial film growth by particle depositio
n that takes into account the diffusion, aggregation and possible evap
oration of the particles deposited on the surface. We find that partic
le evaporation can dramatically affect the growth velocity of the film
, as it is experimentally observed for (0 0 1) CdTe. Puzzling features
of these experiments are given a simple explanation. A model for CdTe
growth is presented, and quantitative agreement is found with experim
ental data. Our results are obtained by extensive computer simulations
as well as through a simple analytic scaling approach. (C) 1998 Elsev
ier Science B.V. All rights reserved.