A. Szczerbakow et al., MONOCRYSTALLINE ZNS-SPHALERITE FILMS GROWN BY ATOMIC LAYER EPITAXY INA GAS-FLOW SYSTEM, Journal of crystal growth, 183(4), 1998, pp. 708-710
Monocrystalline films of cubic ZnS have been produced from zinc chlori
de and hydrogen sulphide by atomic layer epitaxy ALE in a gas flow sys
tem. ''Rocking curve'' measurement gives the half-width of 1500 arcsec
for a sample of approximately 460 nm thick. Tetragonal distortion of
the unit cell is observed. (C) 1998 Elsevier Science B.V. All rights r
eserved.