We investigate the annealing behavior of InAs layers with different th
icknesses in a GaAs matrix. The diffusion enhancement by strain, which
is well established in strained quantum wells, occurs in InAs/GaAs qu
antum dots (QDs). A shift of the QD luminescence peak toward higher en
ergies results from this enhanced diffusion. In the case of structures
where a significant portion of the strain is relaxed by dislocations,
the interdiffusion becomes negligible, and there is a propensity to g
enerate additional dislocations. This results in a decrease of the QD
luminescence intensity, and the QD peak energy is weakly affected.