CROSS-SECTIONAL INFRARED TRANSMISSION MEASUREMENTS FOR HIGHLY SENSITIVE THIN-FILM CHARACTERIZATION

Authors
SASSELLA A BORGHESI A PIVAC B
Citation
A. Sassella et al., CROSS-SECTIONAL INFRARED TRANSMISSION MEASUREMENTS FOR HIGHLY SENSITIVE THIN-FILM CHARACTERIZATION, Mikrochimica acta, 1997, pp. 343-344
Citations number
3
Categorie Soggetti
Chemistry Analytical
Journal title
Mikrochimica acta → ACNP
ISSN journal
00263672
Year of publication
1997
Supplement
14
Pages
343 - 344
Database
ISI
SICI code
0026-3672(1997):<343:CITMFH>2.0.ZU;2-O
Abstract
The results of transmission measurements of SiO2 films in silicon perf ormed in the standard experimental configuration and in a new cross-se ctional configurat dagger ion have bran compared. The cross-sectional measurements proved to be the most suitable for characterization of ve ry thin (few nanometres thick) films and in addition are very sensitiv e.