In this study external reflection infrared spectroscopy and ellipsomet
ry were used to investigate the formation and structure of monolayers
of octadecyltrichlorosilane on native silicon surfaces (Si/SiO2). It i
s shown that during the initial stage of the adsorption process liquid
-like films with randomly oriented hydrocarbon chains are formed. With
increasing surface coverage this isotropic submonolayer structure cha
nges into a highly ordered, crystalline monolayer phase. The overall t
ime required for complete monolayer formation depends strongly on the
water content of the adsorbate solution.