EFFECT OF COMBINED TREATMENT ON THE PHASE-COMPOSITION OF VANADIUM FILMS ON SILICON

Authors
NUPRIENOK IS CHAPLANOV AM SHIBKO AN
Citation
Is. Nuprienok et al., EFFECT OF COMBINED TREATMENT ON THE PHASE-COMPOSITION OF VANADIUM FILMS ON SILICON, Inorganic materials, 34(3), 1998, pp. 252-253
Citations number
7
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
34
Issue
3
Year of publication
1998
Pages
252 - 253
Database
ISI
SICI code
0020-1685(1998)34:3<252:EOCTOT>2.0.ZU;2-3
Abstract
Phase changes at the V/Si interface during thermal annealing combined with irradiation at lambda = 312.5 or 552.0 nm are characterized by el ection diffraction, The electrical properties of the V/Si contact are studied as a function of phase composition.