SPECTROSCOPIC ELLIPSOMETRIC CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS

Amorphous diamondlike carbon films have been investigated by means of spectroscopic ellipsometery (SE). The films were measured by a null el lipsometer in the 230-750 nm range and the measured spectra were analy zed using an empirical dielectric function suitable for amorphous mate rials. The fitting of SE data with empirical dielectric function shows that the measured spectra can be well explained using the empirical d ielectric function. The optical constants calculated from the fitting of SE data were used to calculate the optical reflectance spectra of t hese films. It was found that the calculated reflectance spectra coinc ide with the measured spectra suggesting that the optical properties o btained from the fitting of SE data are accurate. (C) 1998 American Va cuum Society.