Jh. Marsh et al., QUANTUM-WELL INTERMIXING IN MATERIAL SYSTEMS FOR 1.5 MU-M (INVITED), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 810-816
Citations number
22
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Precise control over local optical and electrical characteristics acro
ss a semiconductor wafer is a fundamental requirement for the fabricat
ion of photonic integrated circuits. Quantum well intermixing is one a
pproach, where the band gap of a quantum well structure is modified by
intermixing the well and barrier layers. Here we report recent progre
ss in the development of intermixing techniques for long wavelength ap
plications, discussing two basic techniques. The first is a class of l
aser disordering techniques which take place in the solid state. The s
econd is a novel intermixing technique involving plasma induced damage
. Both techniques enable large band gap shifts to be achieved in stand
ard GaInAsP multiple quantum well laser structures. The potential of b
oth techniques for photonic integration is further demonstrated by the
fabrication and characterisation of extended cavity lasers. (C) 1998
American Vacuum Society. [s0734-2101(98)04602-8].