OBSERVATION OF DIFFERENT GROWTH MODES IN THE MOVPE OF CDS ZNS AND CDSE/ZNSE BY IN-SITU REFLECTANCE ANISOTROPY SPECTROSCOPY/

The early stages of heterostructure growth in metalorganic vapor phase epitaxy of the strongly mismatched systems CdS/ZnS and CdSe/ZnSe are monitored in situ by reflectance anisotropy spectroscopy. Similar to t he Stranski-Krastanow growth mode in III-V lattice mismatched systems like InAs/GaAs, the transient anisotropic reflectance shows two differ ent subsequent growth phases. Based on growth interruption studies, th e phases are tentatively attributed to an initially two-dimensional gr owth of the strained layer and to a three-dimensional growth mode, res pectively. (C) 1998 Published by Elsevier Science B.V. All rights rese rved.