DOPING-DEPENDENT MG DIFFUSION IN ZNMGSSE ZNSSE-STRUCTURES/

Diffusion of magnesium in ZnMgSSe/ZnSSe-structures is investigated. Th e superlattices structures is partly implanted and annealed. Annealing atmosphere, time and temperature are varied. Secondary-ion mass spect roscopy investigations demonstrate that magnesium diffuses via group I I lattice sites. Diffusion enhancement results for p-type doping as we ll as additional group II vacancy generation. Diffusion coefficients f or the different annealing and doping conditions are determined. (C) 1 998 Elsevier Science B.V. All rights reserved.