LPE GROWTH OF CRACK-FREE PBSE LAYERS ON SI(100) USING MBE-GROWN PBSE BAF2/CAF2 BUFFER LAYERS/

Citation
Bn. Strecker et al., LPE GROWTH OF CRACK-FREE PBSE LAYERS ON SI(100) USING MBE-GROWN PBSE BAF2/CAF2 BUFFER LAYERS/, Journal of electronic materials, 26(5), 1997, pp. 444-448
Citations number
34
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
26
Issue
5
Year of publication
1997
Pages
444 - 448
Database
ISI
SICI code
0361-5235(1997)26:5<444:LGOCPL>2.0.ZU;2-0
Abstract
Crack-free PbSe on (100)-oriented Si has been obtained by a combinatio n of liquid phase epitaxy (LPE) and molecular beam epitaxy (MBE) techn iques. MBE is employed first to grow a PbSe/BaF2/CaF2 buffer structure on the (100)-oriented Si. A 2.5 mu m thick PbSe layer is then grown b y LPE. The LPE-grown PbSe displays excellent surface morphology and is continuous over the entire 8 x 8 mm(2) area of growth. This result is surprising because of the large mismatch in thermal expansion coeffic ients between PbSe and Si. Previous attempts to grow crack-free PbSe b y MBE alone using similar buffer structures on (100)-oriented Si have been unsuccessful. It is speculated that the large concentration of Se vacancies in the LPE-grown PbSe layer may allow dislocation climb alo ng higher order slip planes, providing strain relaxation.