Bn. Strecker et al., LPE GROWTH OF CRACK-FREE PBSE LAYERS ON SI(100) USING MBE-GROWN PBSE BAF2/CAF2 BUFFER LAYERS/, Journal of electronic materials, 26(5), 1997, pp. 444-448
Crack-free PbSe on (100)-oriented Si has been obtained by a combinatio
n of liquid phase epitaxy (LPE) and molecular beam epitaxy (MBE) techn
iques. MBE is employed first to grow a PbSe/BaF2/CaF2 buffer structure
on the (100)-oriented Si. A 2.5 mu m thick PbSe layer is then grown b
y LPE. The LPE-grown PbSe displays excellent surface morphology and is
continuous over the entire 8 x 8 mm(2) area of growth. This result is
surprising because of the large mismatch in thermal expansion coeffic
ients between PbSe and Si. Previous attempts to grow crack-free PbSe b
y MBE alone using similar buffer structures on (100)-oriented Si have
been unsuccessful. It is speculated that the large concentration of Se
vacancies in the LPE-grown PbSe layer may allow dislocation climb alo
ng higher order slip planes, providing strain relaxation.