INITIAL GROWTH OF PD ON MGO(001)

Palladium films with nominal thicknesses varying between 0.5 and 40 nm have been grown by electron beam evaporation on polished MgO(0 0 1) w afers at substrate temperatures, T-s, of 100, 300 and 600 degrees C. G razing incidence X-ray diffraction (GIXRD), using a standard laborator y X-ray sourer, and transmission electron microscopy (TEM) were used t o study microstructure, strain, and orientation of the Pd films. GIXRD showed that the films grew epitaxially on MgO(0 0 1). For all tempera tures studied, three-dimensional islands were nucleated. The Pd island s started to coalesce at a nominal film thickness less than or equal t o 1 nm. For T-s = 300 and 600 degrees C, the coalescence was liquid-li ke, and secondary nucleation was observed from nominal film thicknesse s of 2.5 nm. Increasing growth temperature resulted in a decreased Pd island surface coverage. Continuous film formation was obtained at thi ckness 10 and 20 nm for T-s = 100 and 300 degrees C, respectively. Usi ng GIXRD, epitaxial Pd was detected for films with a nominal thickness greater than or equal to 0.5 nm for films grown at 600 degrees C. gre ater than or equal to 1 nm for films grown at 300 degrees C and greate r than or equal to 2.5 nm for films grown at 100 degrees C. In a few c ases, also four 1 1 1-oriented Pd domains rotated 90 degrees with resp ect to each other were detected using GIXRD. The average Pd island siz es, calculated from 2 phi peak broadening, were comparable to the isla nd sizes seen in TEM. For nominal film thicknesses < 2.5 nm; the later al Pd d(0 2 0) plane distance was expanded similar to 0.8% when deposi ted at 600 degrees C, whereas thicker films showed bulk Pd lattice spa cing. (C) 1998 Published by Elsevier Science B.V. All rights reserved.