A new technique for producing polymeric cantilevers with integrated ti
ps for combined scanning-force microscopy/scanning near-field optical
microscopy is described in this paper. By integration reactive ion of
etched polymeric and fluorescent tips to polymer-based cantilevers, it
will become possible to produce apertureless sensors for a scanning n
ear-field optical microscope with the well-known atomic-force distance
control. (C) 1998 Elsevier Science B.V. All rights reserved.