We have studied the C-V dependence of inhomogeneous Schottky diodes by
numerical simulation using Poisson's equation and the current continu
ity equations under the assumption of quasi-static approximation. Inho
mogeneous barriers were modelled by a Gaussian barrier height distribu
tion with two different space distributions of particular patches with
different barrier heights. The results are compared with the simulati
ons of homogeneous diodes. As expected, only a small difference has be
en found between the reverse bias C-V curves and the extracted barrier
height of homogenous diodes and inhomogeneous diodes simulated with t
he mean barrier height of the inhomogeneous diode equal to the barrier
height of the homogeneous diode. A capacitance peak was observed for
both cases in forward bias. The homogeneous and inhomogeneous diodes d
iffer in the peak height. (C) 1998 Elsevier Science Ltd. All rights re
served.