We have investigated the deep electronic levels in n-In0.35Ga0.65As ep
itaxial layers grown by molecular beam epitaxy (MBE) on graded InxGa1-
xAs buffer/GaAs structures. InxGa1-xAs buffer layers with linear, para
bolic and power composition grading law, respectively have been consid
ered. The dependence of the deep levels distribution on the buffer gra
ding law as well as on growth parameters such as the growth temperatur
e and use of As-2 or As-4 beams is reported. (C) 1998 Elsevier Science
Ltd. All rights reserved.