The electrical behavior of Au/SiOx/n-GaAs Schottky structures has been
studied using a statistical approach. II has been concluded that the
obtained unusual electrical behavior is connected mainly with differen
t Fermi-level pinning position and lateral microinhomogeneities of the
barrier height induced by different average thickness of the SiOx int
erlayer along the wafer. The results of cross-sectional transmission e
lectron microscopy and the temperature dependence of the electrical ch
aracteristics confirm this conclusion. (C) 1998 Elsevier Science Ltd.
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