FUSED QUARTZ DISSOLUTION RATE IN SILICON MELTS - INFLUENCE OF BORON ADDITION

The influence of boron addition on fused quartz dissolution rate in si licon melts has been investigated. Fused quartz dissolution rate incre ases with increasing boron concentration by using SiC-coated crucibles . Whereas, in case of fused quartz crucibles, fused quartz dissolution rate decreases with increasing boron concentration. The temperature d ependence of fused quartz dissolution rate in boron-doped silicon melt s is markedly observed. It has been found that in both cases the fract ion of cristobalite area grown on fused quartz rod surface varies wide ly the fused quartz dissolution rate. (C) 1998 Elsevier Science B.V. A ll rights reserved.