GROWTH-KINETICS OF TANTALUM CARBIDE LAYERS PRODUCED ON GRAPHITE BY PYROLYSIS OF TACL5

Authors
SINANI IL CHUZHKO RK CHERNIKOV YP
Citation
Il. Sinani et al., GROWTH-KINETICS OF TANTALUM CARBIDE LAYERS PRODUCED ON GRAPHITE BY PYROLYSIS OF TACL5, Inorganic materials, 34(4), 1998, pp. 342-344
Citations number
8
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
34
Issue
4
Year of publication
1998
Pages
342 - 344
Database
ISI
SICI code
0020-1685(1998)34:4<342:GOTCLP>2.0.ZU;2-E
Abstract
An empirical equation is derived for describing the growth of tantalum carbide layers on graphite via pyrolysis of tantalum pentachloride. T he growth kinetics are examined as a function of deposition temperatur e, layer thickness, and tantalum pentachloride concentration. Analysis shows that the dissolution of the carbide layer by the chlorine evolv ed during pyrolysis has a significant effect on the kinetics of tantal um carbide growth.