PAPERS FROM THE 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE- PREFACE

Authors
LEE JD JEON DR
Citation
Jd. Lee et Dr. Jeon, PAPERS FROM THE 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE- PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(2), 1998, pp. 677-677
Citations number
NO
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
2
Year of publication
1998
Pages
677 - 677
Database
ISI
SICI code
1071-1023(1998)16:2<677:PFT1IV>2.0.ZU;2-J