EFFECT OF N DOPING ON THE ELECTRON-EMISSION PROPERTIES OF DIAMOND-LIKE CARBON-FILM ON A 2-IN. MO FIELD EMITTER ARRAY PANEL

Authors
JUNG JH JU BK KIM H OH MH CHUNG SJ JANG J
Citation
Jh. Jung et al., EFFECT OF N DOPING ON THE ELECTRON-EMISSION PROPERTIES OF DIAMOND-LIKE CARBON-FILM ON A 2-IN. MO FIELD EMITTER ARRAY PANEL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(2), 1998, pp. 705-709
Citations number
13
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
2
Year of publication
1998
Pages
705 - 709
Database
ISI
SICI code
1071-1023(1998)16:2<705:EONDOT>2.0.ZU;2-W
Abstract
We have studied the enhancement of field-emission characteristics by h ydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhan ced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substra te. The maximum emission current for each pixel was increased from 160 to 1520 mu A by a 20 nm N-doped DLC coating. Furthermore, the emissio n current from DLC-coated field emitter arrays (FEAs) is more stable t han that of noncoated FEAs. (C) 1998 American Vacuum Society. [S0734-2 11X(98)07302-8].