INFLUENCE OF SILICON TIP ARRAYS ON EFFECTIVE WORK FUNCTION OF DIAMOND

Authors
YUAN G JIN CC ZHANG BL JIANG H ZHOU TM NING YQ WANG YZ WANG WB JIN YX JI H GU CZ
Citation
G. Yuan et al., INFLUENCE OF SILICON TIP ARRAYS ON EFFECTIVE WORK FUNCTION OF DIAMOND, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(2), 1998, pp. 710-711
Citations number
5
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
2
Year of publication
1998
Pages
710 - 711
Database
ISI
SICI code
1071-1023(1998)16:2<710:IOSTAO>2.0.ZU;2-6
Abstract
The diamond films were deposited on silicon tip arrays by the microwav e plasma chemical vapor deposition technique. The field emission prope rty of diamond films deposited on tips (D tips) was compared with that of diamond on silicon wafers (D wafer). It shows that the effective w ork function becomes large at the high electrical field for the D tip sample, and that can be explained as an effect of the diamond films be ing in a breakdown state. (C) 1998 American Vacuum Society. [S0734-211 X(98)07802-0].