VACUUM ANALYSIS INSIDE A FIELD-EMISSION DISPLAY PANEL - EXPERIMENTAL AND MONTE-CARLO SIMULATION RESULTS

Qualitative analysis of residual gases in fully sealed 4 in. color fie ld emission display (FED) devices has been performed utilizing a home- made mass spectrometer. Relative molecule mass for each gas was measur ed as a function of time during an exhausting process. A real 4 in. pa nel experimentally exhibited several gases, such as H2O, H-2, OH, CO, N-2, and CO2, etc. Partial pressure of each residual gas was calculate d as a function of exhausting time, resulting in an estimation of tota l pressure in a real panel. In addition, for simple comparison, vacuum properties inside the panel were analyzed using a Monte Carlo method, based on molecular flow conductance inside it with an exhausting pipe . Transmission probability of molecules at various geometrical and tem poral parameters was simulated for pressure optimization inside the pa nel during exhausting. The results were used to calculate the pressure of the FED panel, resulting in comparison with experimental values. I t would provide the basis in future design and fabrication of real FED panel. (C) 1998 American Vacuum Society. [S0734-211X(98)04502-8].