X. Sheng et al., EFFICIENT SURFACE-EMITTING COLD CATHODES BASED ON ELECTROLUMINESCENT POROUS SILICON DIODES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(2), 1998, pp. 793-795
The porosity-modulation technique has been applied to improve the emis
sion properties of the previously reported surface-emitting cold catho
des based on electroluminescent porous silicon (PS) diodes. It is demo
nstrated here that by introducing a modified structure into the PS lay
er, the emission efficiency is significantly improved. An extremely hi
gh efficiency of 12% has been obtained. A significant decrease in the
emission current fluctuation and a consequent increase in the durabili
ty of the emission are also observed. These results are due to a regul
ated electric field distribution near the outer surface of the PS laye
r. (C) 1998 American Vacuum Society. [S0734-211X(98)04102-X].