H. Adachi et al., REDUCTION OF WORK FUNCTION ON A W(100) FIELD EMITTER DUE TO COADSORPTION OF SI AND TI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(2), 1998, pp. 875-879
Selective reduction of work function on a W(100) field emitter was obs
erved due to co-adsorption of Si and Ti, followed by angular confineme
nt of field emission on the top (100) surface. Si was vacuum deposited
on the side surface near the apex of the field emitter by an amount,
which is enough for spreading by 1 ML. Then it was flash heated to spr
ead the deposited Si over the apex surface. Ti was vacuum deposited ov
er it from the opposite side and heat treated to spread over. The work
function, which is determined from the Fowler-Nordheim plot, reduced
to 3.3 eV. It is assumed that the work function of the clean tungsten
is 4.5 eV. The experimental evidences suggest that there is a certain
Ti/Si ratio for giving the minimum value of the work function. (C) 199
8 American Vacuum Society. [S0734-211X(98)02102-7].