CHARACTERISTICS AND CIRCUIT MODEL OF A FIELD-EMISSION TRIODE

A circuit model for a held emission triode has been proposed. The mode l parameters have been extracted from the fabricated silicon tip array and verified by being compared to the results simulated by circuit si mulator (SPICE). The cutoff frequency can be calculated from the param etric capacitance and the transconductance values extracted from measu rements. For the field emission triode, the capacitance of 3.45 fF/tip and the transconductance of 0.94 nS/tip have been measured under the emission current of 4.1 nA/tip. From these values, the cutoff frequenc y is predicted to be 43 kHz but the measured one came out to be 6 kHz because of the parasitic capacitance components. (C) 1998 American Vac uum Society. [S0734-211X(98)02002-2].