SIMPLE ANALYTICAL EXPRESSION FOR DOSE-DEPENDENT ION-IMPLANTED SB PROFILES USING A JOINED HALF GAUSSIAN FUNCTION AND ONE WITH EXPONENTIAL TAIL

Authors
SUZUKI K SUDO R FEUDEL T
Citation
K. Suzuki et al., SIMPLE ANALYTICAL EXPRESSION FOR DOSE-DEPENDENT ION-IMPLANTED SB PROFILES USING A JOINED HALF GAUSSIAN FUNCTION AND ONE WITH EXPONENTIAL TAIL, Solid-state electronics, 42(3), 1998, pp. 463-465
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
42
Issue
3
Year of publication
1998
Pages
463 - 465
Database
ISI
SICI code
0038-1101(1998)42:3<463:SAEFDI>2.0.ZU;2-5