MICRO-RAMAN CHARACTERIZATION OF STRESS-DISTRIBUTION WITHIN FREE STANDING MONOCRYSTALLINE AND POLYCRYSTALLINE SILICON MEMBRANES

Stress measurements were performed in a free standing monocrystalline cantilever and a polycrystalline silicon membrane suspended over a dee p cavity, using micro-Raman spectroscopy. These micromechanical struct ures were fabricated using porous silicon as a sacrificial layer. The results show that the stress varies across the membrane and the cantil ever, the level of stress in the latter being lower than in the membra ne.