FABRICATION OF MULTIPURPOSE AFM SCM/SEP MICROPROBE WITH INTEGRATED PIEZORESISTIVE DEFLECTION SENSOR AND ISOLATED CONDUCTIVE TIP/

Scanning microprobe with multipurpose capabilities is presented. Atomi c Force Microscopy (AFM), Scanning Capacitance Microscopy (SCM) and Sc anning Electrostatic Probing (SEP) measurements could be simultaneousl y performed with the silicon tip integrated with piezoresistive cantil ever. Manufacturing process of the microprobe. based on double side bu lk\surface micromachining of SOI substrates, is described. Presented r esults of measurements of the nearfield forces with nanometer resoluti on revealed that surface topography of the samples together with its e lectronic properties could be scanned. This makes our microprobe usefu l e.g. for surface analysis of submicron IC's.