FABRICATION AND CHARACTERIZATION OF AN ARRAY OF MINIATURIZED ELECTROSTATIC MULTIPOLES

Authors
GROSS HS PRINS FE KERN DP
Citation
Hs. Gross et al., FABRICATION AND CHARACTERIZATION OF AN ARRAY OF MINIATURIZED ELECTROSTATIC MULTIPOLES, Microelectronic engineering, 42, 1998, pp. 489-492
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
42
Year of publication
1998
Pages
489 - 492
Database
ISI
SICI code
0167-9317(1998)42:<489:FACOAA>2.0.ZU;2-W
Abstract
We have fabricated an array of electrostatic octupoles consisting of s ilicon electrodes on borosilicate glass as carrier material and isolat or. Metal wires on the glass carrier connect the electrodes with conta ct pads on outer areas. This enables the fabrication of hundreds of mu ltipoles with the possibility of external control. Measurements with r egard to electrical resistance and estimates of critical frequencies a re presented.