MICRO-EXTRACTION SPECTROMETER FOR VOLTAGE CONTRAST IN THE SEM

Authors
DINNIS AR
Citation
Ar. Dinnis, MICRO-EXTRACTION SPECTROMETER FOR VOLTAGE CONTRAST IN THE SEM, Microelectronic engineering, 42, 1998, pp. 611-614
Citations number
5
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
42
Year of publication
1998
Pages
611 - 614
Database
ISI
SICI code
0167-9317(1998)42:<611:MSFVCI>2.0.ZU;2-M
Abstract
Quantitative voltage-contrast measurements can be improved by using an integrated miniature spectrometer situated very close to the specimen . High extraction fields can be used combined with low extraction volt ages. The small size of the system also gives potential advantages for high-frequency performance and allows incorporation of the system int o existing SEMs.