CALIBRATION OF TRANSFER STANDARDS FOR SPM

Authors
GAOFENG,"PENG GS KOENDERS L
Citation
Gs. Gaofeng,"peng et L. Koenders, CALIBRATION OF TRANSFER STANDARDS FOR SPM, Microelectronic engineering, 42, 1998, pp. 615-618
Citations number
2
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
42
Year of publication
1998
Pages
615 - 618
Database
ISI
SICI code
0167-9317(1998)42:<615:COTSFS>2.0.ZU;2-2
Abstract
A scanning probe microscope was used to investigate and to calibrate s ome of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 mu m fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully cali brated by using laser interferometer.