SYNTHESIS OF NANOMETER-SIZED SIC POWDERS THROUGH CHEMICAL-VAPOR-DEPOSITION - I - EFFECT OF REACTION TEMPERATURE

Nanometer-sized SiC powders have been synthesized through chemical vap our deposition using self-designed setup. The features of the powders have been examined by X-ray diffraction, transmission electron microsc opy, infrared ray absorption spectrum and chemical analysis, with emph asis intentionally put on the effect of reaction temperature. It is di sclosed that SiC powders with narrow size distribution, spherical shap es high purity, excellent crystallinity and as fine as 9 nm being the smallest average size that can he synthesized. Both the particle size and grain size increase with increasing temperatures. The highest puri ty is obtained when the reaction occurs at 1300 degrees C. (C) 1998 El sevier Science S.A. All rights reserved.