STRUCTURE AND MORPHOLOGY OF CO CU/CO AND CU/CO/CU MULTILAYER FILMS/

Co/Cu/Co and Cu/Co/Cu multilayers were produced by magnetron sputterin g onto (100) NaCl substrates. Their phase composition, structure, and morphology were studied by x-ray and electron diffraction techniques, electron microscopy, and atomic force microscopy. It was found that th e Co layers grew by a combined mechanism and had stepped surfaces. The Cu layers grew by an island mechanism. Between Cu and Co, Cu2O layers were formed. The Cu layers had higher structural perfection than the Co layers.