3-DIMENSIONAL SIMULATION OF SURFACE EVOLUTION DURING GROWTH AND EROSION

A concise review of the basic ideas of the generalized kinematic model of surface evolution during growth and erosion is presented. Interpre tation of the main results of this model as well as some specific rule s and advice as to how this model is applied in practical simulations are also presented. It is concluded that three-dimensional (3D) comput er simulation of surface evolution is only possible by the use of adeq uate, theoretically motivated numerical methods. As a demonstration, 3 D topography simulations during broad and focused ion beam bombardment , chemical vapor deposition, and reactive ion etching using the 3D cod e DINESE are also presented.