K. Mochiji et al., PHOTODISSOCIATION OF SF6 NEAR THE F 1S ABSORPTION-EDGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 216-218
Citations number
13
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Core-excited fragmentation of SF6 is analyzed by using monochromatic s
ynchrotron radiation and time-of-flight mass spectroscopy. Excitation
of fluorine K and sulfur L levels yields highly dissociated and multip
ly charged ions such as SF2+, S2+ and S3+ that are not seen with valen
ce level excitation. Excitation of sulfur L levels is found to be more
dissociative than that of fluorine K levels in the sense that more at
omic ions and more multiply charged sulfur ions are produced. In addit
ion to the above results, the generation mechanism for these ions is d
iscussed by considering the multistep Auger cascade decay of core hole
s.