Si1-yCy and Si1-x-yGexCy alloy layers

Citation
K. Eberl et al., Si1-yCy and Si1-x-yGexCy alloy layers, SEM SEMIMET, 56, 1999, pp. 387-422
Citations number
111
Categorie Soggetti
Current Book Contents
ISSN journal
00808784
Volume
56
Year of publication
1999
Pages
387 - 422
Database
ISI
SICI code
0080-8784(1999)56:<387:SASAL>2.0.ZU;2-R