MATERIALS AND TECHNOLOGY CHALLENGES IN SEMICONDUCTOR PROCESSING

Authors
COFFA S MEYYAPPAN M NISHI H
Citation
S. Coffa et al., MATERIALS AND TECHNOLOGY CHALLENGES IN SEMICONDUCTOR PROCESSING, Solid-state electronics, 42(5), 1998, pp. 1-4
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
42
Issue
5
Year of publication
1998
Pages
1 - 4
Database
ISI
SICI code
0038-1101(1998)42:5<1:MATCIS>2.0.ZU;2-T