M. Spagnol et al., TURBOMOLECULAR PUMP DESIGN FOR HIGH-PRESSURE OPERATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1151-1156
Citations number
8
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
A simple model of compressible. Couette-Poiseuille flow is developed t
o describe the pressure distribution in a single Gaede stage, in visco
us flow. From this a scaling law to optimize the stage design has been
derived. Both model and scaling law are verified using experimental m
easurements of different channel geometries. A practical limit to high
pressure operation: is set by the power consumption of the motor. A p
rogram has been developed to optimize the design of a multistage Gaede
pump and the results of it suggests that a pump with an axial height
of only 3 cm can exhaust at pressures up to 100 mbar. (C) 1998 America
n Vacuum Society.