DISCRETIZATION OF CURVED LINES AND ARBITRARY AREAS FOR ION AND ELECTRON-BEAM WRITING ON A NONRECTANGULAR GRID

Authors
DEVRIES DK WIECK AD PLOOG K
Citation
Dk. Devries et al., DISCRETIZATION OF CURVED LINES AND ARBITRARY AREAS FOR ION AND ELECTRON-BEAM WRITING ON A NONRECTANGULAR GRID, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 14-19
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
1
Year of publication
1994
Pages
14 - 19
Database
ISI
SICI code
1071-1023(1994)12:1<14:DOCLAA>2.0.ZU;2-P
Abstract
A method is presented to discretize almost arbitrary curves and areas on nonrectangular grids. This method can be applied in focused ion and electron beam systems. Distortion of the physical writing grid can be taken into account at the discretization, thus eliminating the need f or a correction step afterwards.