REALIZATION OF LIMITED-AREA CATHODES AND THEIR PERFORMANCE IN AN ELECTRON-OPTICAL COLUMN

Authors
MALONEY CE NAKAMURA H BROERS AN XIA S PETERS L
Citation
Ce. Maloney et al., REALIZATION OF LIMITED-AREA CATHODES AND THEIR PERFORMANCE IN AN ELECTRON-OPTICAL COLUMN, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 26-31
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
1
Year of publication
1994
Pages
26 - 31
Database
ISI
SICI code
1071-1023(1994)12:1<26:ROLCAT>2.0.ZU;2-4
Abstract
Limited-area cathodes based upon impregnated dispenser cathode materia l have been investigated in an electron optical column at accelerating voltages of up to 30 kV. A peak axial brightness of about 6 x 10(5) A /cm2 sr was obtained at this voltage using a flat cathode. Brightness values greater by a factor of 10 were measured using a conical limited -area cathode with a tip radius of curvature of 0.075 mm. The latter m easurements were affected by space-charge spreading in the beam.