HYDROGEN IN SILICON - FUNDAMENTAL PROPERTIES AND CONSEQUENCES FOR DEVICES

The interactions between hydrogen and silicon are investigated based o n first-principles calculations. After a comprehensive overview of var ious configurations attention is focused on the energetics and dissoci ation of Si-H bonds. An examination of the dissociation mechanism of S i-H bonds suggests an explanation for the observed difference in stabi lity between hydrogen and deuterium at dangling bonds. Connections bet ween the phenomena at surfaces, interfaces; and in amorphous materials will be pointed out. (C) 1998 American Vacuum Society.