PAPERS FROM THE 2ND HIGH-DENSITY PLASMA WORKSHOP - PREFACE

Authors
FORSTER J
Citation
J. Forster, PAPERS FROM THE 2ND HIGH-DENSITY PLASMA WORKSHOP - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 407-407
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
1
Year of publication
1994
Pages
407 - 407
Database
ISI
SICI code
1071-1023(1994)12:1<407:PFT2HP>2.0.ZU;2-1