Ra. Stewart et al., 2-DIMENSIONAL FLUID MODEL OF HIGH-DENSITY INDUCTIVELY-COUPLED PLASMA SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 478-485
A two-dimensional (r,z) fluid model has been developed to study plasma
transport in inductively coupled plasmas (ICP). Electron heating is t
reated by assuming a fixed, spatially varying power deposition profile
in the electron energy balance equation. A high aspect ratio ICP reac
tor geometry has been studied, with two assumed power profiles: spatia
lly uniform and localized to within several skin depths of the radial
wall. The effect of neutral gas pressure on plasma uniformity is prese
nted for an argon discharge over the range of 1-20 mTorr. Comparisons
between the fluid model and predictions from a spatially averaged glob
al model show similar scaling of plasma density, electron temperature,
and plasma potential over a wide range of pressure and power.