TECHNOLOGY FOR MOVABLE MICROSTRUCTURES - TRANSFER OF LABORATORY PROCESSES TO INDUSTRIAL-PRODUCTION

Authors
ROETTING O HECKELE M BACHER W
Citation
O. Roetting et al., TECHNOLOGY FOR MOVABLE MICROSTRUCTURES - TRANSFER OF LABORATORY PROCESSES TO INDUSTRIAL-PRODUCTION, Microsystem technologies, 4(3), 1998, pp. 120-121
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
4
Issue
3
Year of publication
1998
Pages
120 - 121
Database
ISI
SICI code
0946-7076(1998)4:3<120:TFMM-T>2.0.ZU;2-W