A COMPARATIVE-STUDY OF INTEGRATED FERROELECTRIC POLYMER PYROELECTRIC SENSORS

This paper presents a comparative study of integrated pyroelectric sen sors based on ferroelectric polymers. Two deposition technologies of P VDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 mu m PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a 1 mu m VDF/TrFE copolymer is coat ed directly using a spin-coating technique. The theoretical response o f both PVDF and VDF/TrFE pyroelectric sensors are calculated and relat ed to the measured values. Peak responsivities of 4.5 V/W at 200 Hz an d 3 V/W at 1 kHz have been achieved for the pyroelectric sensors based on PVDF and VDF/TrFE copolymer, respectively. Despite the responsivit y of PVDF being slightly higher than that of the VDF/TrFE copolymer, t he choice of which polymer to use will depend on the application and t he preferred processing route.