Rm. Sieg et al., TOWARD DEVICE-QUALITY GAAS GROWTH BY MOLECULAR-BEAM EPITAXY ON OFFCUTGE SI1-XGEX/SI SUBSTRATES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1471-1474
The epitaxial growth of GaAs on Si substrates through the use of a Ge/
graded Si1-xGex/Si buffer layer would allow monolithic integration of
GaAs-based opto-electronics with Si microelectronics. As an initial st
ep toward this goal, this study examines factors which influence the q
uality of GaAs growth by molecular beam epitaxy (MBE) on bulk Ge subst
rates. Key findings include the need for an epitaxial Ge smoothing cap
deposited in the MBE chamber, the significant detrimental effect of A
s overpressure on the resultant GaAs crystalline quality, and the effi
ciency of a very thin (similar to 3 nm) migration enhanced epitaxy (ME
E) nucleation layer at suppressing both anti-phase domain (APD) format
ion and interdiffusion across the GaAs/Ge heterointerface. Using this
developed optimized growth process, APD-free GaAs on Ge is obtained wh
ich has undetectable Ga and Fe cross-diffusion, and As diffusion into
the substrate at less than or equal to 1 x 10(18) cm(-3). Preliminary
results for growths on Ge/Si1-xGex/Si substrates are also presented. (
C) 1998 American Vacuum Society.