A. Barz et al., GERMANIUM-RICH SIGE BULK SINGLE-CRYSTALS GROWN BY THE VERTICAL BRIDGMAN METHOD AND BY ZONE-MELTING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1627-1630
Silicon-germanium single crystals with a Si content up to 10 at. % hav
e been grown by the vertical Bridgman technique in a monoellipsoid mir
ror furnace. Single crystal regions up to 50 at. % have been realized
by zone melting in a double ellipsoid mirror furnace. The typical high
temperature gradients of radiation heated facilities (grad T up to 10
0 K/cm or even higher, depending on the sample geometry) reduce the oc
currence of constitutional supercooling and stabilize the growth inter
face. Photoluminescence measurements as well as rocking curves and etc
h pit densities reveal a high crystal quality. Effective segregation c
oefficients of Al, Ga, In, P, As, and Sb in Ge1-xSx (x<13 at. %) were
determined. (C) 1998 American Vacuum Society.