A. Daami et al., EFFECT OF HYDROGENATION ON MISFIT DISLOCATIONS IN SIGE SI STRUCTURES FOR PHOTOVOLTAIC APPLICATIONS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1737-1739
Thick Si0.9Ge0.1 relaxed layers grown by chemical vapor deposition on
Si(100) oriented substrates are investigated by photoluminescence (PL)
spectroscopy. Resolved excitor;ic near-band-gap luminescence is obser
ved in as-grown and hydrogen treated samples. Phonon assisted transiti
ons are also well identified. The effect of hydrogenation is to enhanc
e the luminescence related to the near-band gap. This enhancement is c
orrelated with a quenching in the dislocation related PL especially fo
r the D3-D4 bands and the T band. This indicates that hydrogenation pa
ssivates radiative centers inside dislocation cores which are, respons
ible, beside nonradiative channels, for the quenching of SiGe band-gap
edge luminescence. (C) 1998 American Vacuum Society.